Ma Semicera's 4”6” High Purity Semi-Insulating SiC Ingots adapangidwa kuti akwaniritse miyezo yeniyeni yamakampani opanga ma semiconductor. Ingots izi zimapangidwa ndi cholinga cha chiyero ndi kusasinthasintha, zomwe zimawapangitsa kukhala osankhidwa bwino pamagetsi apamwamba komanso othamanga kwambiri omwe ntchito ndizofunikira kwambiri.
Makhalidwe apadera a ma SiC ingots awa, kuphatikizapo kutenthetsa kwapamwamba kwambiri komanso mphamvu zamagetsi zamagetsi, zimawapangitsa kukhala oyenera kugwiritsidwa ntchito pamagetsi amagetsi ndi ma microwave. Chikhalidwe chawo cha semi-insulating chimalola kuti kutentha kwabwino kuwonongeke komanso kusokoneza pang'ono kwa magetsi, zomwe zimapangitsa kuti zikhale zogwira mtima komanso zodalirika.
Semicera imagwiritsa ntchito njira zopangira zamakono kuti apange ma ingots okhala ndi kristalo wapadera komanso wofanana. Kulondola uku kumatsimikizira kuti ingot iliyonse imatha kugwiritsidwa ntchito modalirika pamapulogalamu omvera, monga ma amplifiers apamwamba kwambiri, ma laser diode, ndi zida zina za optoelectronic.
Zopezeka mumitundu yonse ya 4-inchi ndi 6-inchi, ma ingots a Semicera a SiC amapereka kusinthasintha komwe kumafunikira masikelo osiyanasiyana opanga ndi zofunikira zaukadaulo. Kaya ndi kafukufuku ndi chitukuko kapena kupanga zambiri, ma ingotswa amapereka magwiridwe antchito komanso kulimba komwe makina amakono amafunikira.
Posankha Semicera's High Purity Semi-Insulating SiC Ingots, mukugulitsa zinthu zomwe zimaphatikiza sayansi yapamwamba ndi ukadaulo wosayerekezeka wopanga. Semicera idadzipereka kuti ithandizire luso komanso kukula kwamakampani opanga ma semiconductor, ndikupereka zida zomwe zimathandizira kupanga zida zamakono zamagetsi.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
