Semicera's 4 ", 6", ndi 8" N-mtundu wa SiC Ingots zimayimira kupambana kwa zida za semiconductor, zomwe zimapangidwira kuti zikwaniritse zofunikira zamakono zamagetsi ndi zamagetsi. ntchito ndi moyo wautali.
Ma Ingots athu amtundu wa N-SiC amapangidwa pogwiritsa ntchito njira zopangira zotsogola zomwe zimakulitsa mphamvu zawo zamagetsi komanso kukhazikika kwamafuta. Izi zimawapangitsa kukhala abwino pakugwiritsa ntchito mphamvu zamphamvu komanso zothamanga kwambiri, monga ma inverters, ma transistors, ndi zida zina zamagetsi zamagetsi komwe kuchita bwino komanso kudalirika ndikofunikira.
Doping yolondola ya ingots iyi imatsimikizira kuti imapereka magwiridwe antchito osasinthika komanso obwerezabwereza. Kusasinthika kumeneku ndikofunikira kwa opanga ndi opanga omwe akukankhira malire aukadaulo pazinthu monga zamlengalenga, magalimoto, ndi matelefoni. Ma Ingots a Semicera a SiC amathandizira kupanga zida zomwe zimagwira ntchito bwino m'mikhalidwe yovuta kwambiri.
Kusankha Semicera's N-Type SiC Ingots kumatanthauza kuphatikiza zida zomwe zimatha kupirira kutentha kwambiri komanso kunyamula magetsi mwachangu. Ingots izi ndizofunikira kwambiri popanga zida zomwe zimafunikira kasamalidwe kabwino ka kutentha komanso magwiridwe antchito apamwamba, monga ma amplifiers a RF ndi ma module amagetsi.
Posankha Semicera's 4", 6", ndi 8" N-mtundu wa SiC Ingots, mukugulitsa malonda omwe amaphatikiza zinthu zapadera ndi kudalirika komanso kudalirika komwe kumafunidwa ndi matekinoloje apamwamba a semiconductor. Semicera akupitiliza kutsogolera makampaniwa ndi kupereka njira zatsopano zomwe zimayendetsa patsogolo kupanga zida zamagetsi.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |