4 ″ 6″ 8 ″ Ma conductive & Semi-insulating Substrates

Kufotokozera Kwachidule:

Semicera yadzipereka kupereka magawo apamwamba kwambiri a semiconductor, omwe ndi zida zofunika kwambiri popanga zida za semiconductor. Magawo athu amagawidwa m'mitundu yochititsa chidwi komanso yotsekera kuti ikwaniritse zosowa zamitundu yosiyanasiyana. Pomvetsetsa mozama zamagetsi zamagawo, Semicera imakuthandizani kusankha zida zoyenera kwambiri kuti muwonetsetse kuti zikuyenda bwino pakupanga zida. Sankhani Semicera, sankhani zabwino kwambiri zomwe zimatsindika kudalirika komanso luso.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Silicon carbide (SiC) single crystal chuma ali ndi gulu lalikulu kusiyana m'lifupi (~ Si 3 nthawi), mkulu matenthedwe madutsidwe (~Si 3.3 nthawi kapena GaAs 10 nthawi), mkulu ma elekitironi machulukitsidwe mlingo kusamuka (~Si 2.5 nthawi), mkulu kuwonongeka magetsi munda (~ Si 10 nthawi kapena GaAs 5 nthawi) ndi zina zabwino kwambiri.

Zida za semiconductor za m'badwo wachitatu makamaka zikuphatikizapo SiC, GaN, diamondi, ndi zina zotero, chifukwa kusiyana kwake kwa gulu (Mwachitsanzo) ndi kwakukulu kuposa kapena kofanana ndi ma volts 2.3 amagetsi (eV), omwe amadziwikanso kuti zipangizo zamakono zopangira magetsi. Poyerekeza ndi zida za semiconductor za m'badwo wachitatu ndi wachiwiri, zida za semiconductor za m'badwo wachitatu zili ndi zabwino zaukadaulo wapamwamba wamatenthedwe, malo amagetsi osweka kwambiri, kuchuluka kwakusamuka kwa ma elekitironi apamwamba komanso mphamvu zomangirira, zomwe zimatha kukwaniritsa zofunikira zatsopano zamaukadaulo amakono amagetsi apamwamba. kutentha, mphamvu, kuthamanga, kuthamanga kwafupipafupi komanso kukana kwa radiation ndi zinthu zina zovuta. Ili ndi mwayi wofunikira wogwiritsa ntchito chitetezo cha dziko, ndege, ndege, kufufuza mafuta, kusungirako kuwala, ndi zina zotero, ndipo imatha kuchepetsa kutaya mphamvu ndi 50% m'mafakitale ambiri monga mauthenga a Broadband, mphamvu ya dzuwa, kupanga magalimoto, kuyatsa kwa semiconductor, ndi gridi yanzeru, ndipo kumatha kuchepetsa kuchuluka kwa zida ndi 75%, zomwe ndizofunikira kwambiri pakukula kwa sayansi ndiukadaulo wa anthu.

Mphamvu za Semicera zimatha kupereka makasitomala apamwamba kwambiri (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; Komanso, tikhoza kupereka makasitomala ndi homogeneous ndi heterogeneous pakachitsulo carbide epitaxial mapepala; Tikhozanso kusintha pepala la epitaxial malinga ndi zosowa zenizeni za makasitomala, ndipo palibe chiwerengero chochepa cha dongosolo.

ZOCHITIKA ZONSE

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

Kanthu

8-inchi

6-inchi

4-inchi
nP n-pm n-Zam SI SI
TTV(GBIR) ≤6um ≤6um
Bow(GF3YFCD) - Mtengo Wonse ≤15μm ≤15μm ≤25μm ≤15μm
Warp(GF3YFER) ≤25μm ≤25μm ≤40μm ≤25μm
LTV(SBIR) -10mmx10mm <2 mu
Wafer Edge Beveling

PAMENE MALIZA

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-Insulating

Kanthu

8-inchi

6-inchi

4-inchi

nP n-pm n-Zam SI SI
Pamwamba Pamwamba Mbali ziwiri za Optical Polish, Si- Face CMP
SurfaceRoughness (10um x 10um) Si-FaceRa≤0.2nm
C-Face Ra≤ 0.5nm
(5umx5um) Si-Face Ra≤0.2nm
C-Face Ra≤0.5nm
Chips za Edge Palibe Chololedwa (kutalika ndi m'lifupi≥0.5mm)
Inde Palibe Chololedwa
Zikwapu (Si-Face) Unyinji.≤5, Zowonjezera
Utali ≤0.5× wafer awiri
Unyinji.≤5, Zowonjezera
Utali ≤0.5× wafer awiri
Unyinji.≤5, Zowonjezera
Utali ≤0.5× wafer awiri
Ming'alu Palibe Chololedwa
Kupatula M'mphepete 3 mm
Chithunzi cha 2-2
Gawo 2-1
Zophika za SiC

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