Semicera 3C-SiC Wafer Substrates amapangidwa kuti azipereka nsanja yolimba yamagetsi am'badwo wotsatira komanso zida zothamanga kwambiri. Ndi katundu wapamwamba kwambiri wamafuta ndi mawonekedwe amagetsi, magawowa amapangidwa kuti akwaniritse zofunikira zamakono zamakono.
Mapangidwe a 3C-SiC (Cubic Silicon Carbide) a Semicera Wafer Substrates amapereka maubwino apadera, kuphatikiza matenthedwe apamwamba komanso kutsika kocheperako kowonjezera kwamafuta poyerekeza ndi zida zina za semiconductor. Izi zimawapangitsa kukhala chisankho chabwino kwambiri pazida zomwe zimagwira ntchito kutentha kwambiri komanso mphamvu zamagetsi.
Ndi mphamvu yamagetsi yamagetsi yamagetsi komanso kukhazikika kwamphamvu kwamankhwala, Semicera 3C-SiC Wafer Substrates imatsimikizira kugwira ntchito kwanthawi yayitali komanso kudalirika. Zinthuzi ndizofunikira kwambiri pamagwiritsidwe ntchito monga radar yothamanga kwambiri, kuyatsa kolimba, ndi ma inverters amagetsi, pomwe kuchita bwino komanso kulimba ndikofunikira.
Kudzipereka kwa Semicera pakuchita bwino kumawonekera mukupanga mwaluso kwa 3C-SiC Wafer Substrates yawo, kuwonetsetsa kufanana komanso kusasinthika pagulu lililonse. Kulondola uku kumathandizira kuti pakhale ntchito yonse komanso moyo wautali wa zida zamagetsi zomwe zimamangidwa pa iwo.
Posankha Semicera 3C-SiC Wafer Substrates, opanga amapeza mwayi wopeza zinthu zotsogola zomwe zimathandizira kupanga zida zazing'ono, zachangu, komanso zogwira mtima kwambiri. Semicera ikupitilizabe kuthandizira luso laukadaulo popereka mayankho odalirika omwe amakwaniritsa zofunikira zomwe zikuchitika pamsika wa semiconductor.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
