Semiceraamanyadira kupereka30mm Aluminium Nitride Wafer Substrate, chinthu chapamwamba kwambiri chomwe chinapangidwa kuti chikwaniritse zofunikira zamapulogalamu amakono amagetsi ndi optoelectronic. Magawo a Aluminiyamu Nitride (AlN) amadziwika chifukwa cha kupangika kwawo kwamphamvu kwamafuta komanso mphamvu zotchinjiriza zamagetsi, zomwe zimawapangitsa kukhala abwino kwambiri pazida zogwira ntchito kwambiri.
Zofunika Kwambiri:
• Mwapadera Thermal Conductivity: Ndi30mm Aluminium Nitride Wafer Substrateimadzitamandira ndi matenthedwe opitilira 170 W/mK, okwera kwambiri kuposa zida zina zapansi panthaka, kuwonetsetsa kuti kutentha kumatayika bwino pamapulogalamu amphamvu kwambiri.
•High Electrical Insulation: Ndi mphamvu zabwino zotchingira magetsi, gawo lapansili limachepetsa kuyankhulana ndi kusokoneza mazizindikiro, ndikupangitsa kuti likhale loyenera kugwiritsa ntchito ma RF ndi ma microwave.
•Mphamvu zamakina: Ndi30mm Aluminium Nitride Wafer Substrateimapereka mphamvu zamakina apamwamba komanso kukhazikika, kuwonetsetsa kukhazikika komanso kudalirika ngakhale pakugwira ntchito movutikira.
•Zosiyanasiyana Mapulogalamu: Gawo laling'onoli ndilabwino kugwiritsa ntchito ma LED amphamvu kwambiri, ma laser diode, ndi zida za RF, zomwe zimakupatsirani maziko olimba komanso odalirika pama projekiti anu ovuta kwambiri.
•Precision Fabrication: Semicera imawonetsetsa kuti gawo lililonse lopindika limapangidwa mwatsatanetsatane kwambiri, limapereka makulidwe a yunifolomu ndi mawonekedwe apamwamba kuti akwaniritse miyezo yoyenera ya zida zapamwamba zamagetsi.
Konzani bwino komanso kudalirika kwa zida zanu ndi Semicera's30mm Aluminium Nitride Wafer Substrate. Magawo athu adapangidwa kuti azipereka magwiridwe antchito apamwamba, kuwonetsetsa kuti makina anu amagetsi ndi optoelectronic akugwira ntchito momwe angathere. Khulupirirani Semicera pazida zotsogola zomwe zimatsogolera makampani kukhala abwino komanso mwatsopano.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
