Semicerandi wokondwa kupereka2" Gallium Oxide Substrates, zida zotsogola zopangidwira kupititsa patsogolo magwiridwe antchito a zida zapamwamba za semiconductor. Magawo awa, opangidwa kuchokera ku Gallium Oxide (Ga2O3), imakhala ndi bandgap yotalikirapo kwambiri, yomwe imawapangitsa kukhala abwino kwambiri pamagetsi apamwamba, ma frequency apamwamba, ndi ma UV optoelectronic application.
Zofunika Kwambiri:
• Ultra-Wide Bandgap: Ndi2" Gallium Oxide Substratesperekani bandgap yabwino kwambiri ya pafupifupi 4.8 eV, yomwe imalola kuti magetsi azigwira ntchito komanso kutentha kwambiri, kupitilira luso la zida zama semiconductor monga silikoni.
•Mwapadera Kuwonongeka kwa Voltage: Magawo awa amathandizira kuti zida zizigwira ma voltages okwera kwambiri, kuwapangitsa kukhala abwino kwambiri pamagetsi amagetsi, makamaka pamagetsi apamwamba kwambiri.
•Zabwino Kwambiri Thermal Conductivity: Ndi kukhazikika kwapamwamba kwa kutentha, zigawozi zimakhalabe zogwira ntchito ngakhale m'madera otentha kwambiri, abwino kwa ntchito zamphamvu kwambiri komanso kutentha kwambiri.
•Zinthu Zapamwamba: Ndi2" Gallium Oxide Substratesperekani kachulukidwe kakang'ono kachilema komanso mtundu wapamwamba wa crystalline, kuwonetsetsa kuti zida zanu za semiconductor zikuyenda bwino komanso zodalirika.
•Zosiyanasiyana Mapulogalamu: Magawo ang'onoang'ono awa ndi oyenerera ntchito zosiyanasiyana, kuphatikiza ma transistors amagetsi, ma Schottky diode, ndi zida za UV-C za LED, zomwe zimapereka maziko olimba azinthu zonse zamagetsi ndi ma optoelectronic.
Tsegulani kuthekera konse kwa zida zanu za semiconductor ndi Semicera's2" Gallium Oxide Substrates. Magawo athu adapangidwa kuti akwaniritse zosowa zamapulogalamu apamwamba amakono, kuwonetsetsa kuti magwiridwe antchito apamwamba, odalirika komanso odalirika. Sankhani Semicera pazida zamakono za semiconductor zomwe zimayendetsa zatsopano.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
