Zithunzi za Semicera10x10mm Nonpolar M-ndege Aluminiyamu gawo lapansiidapangidwa mwaluso kuti ikwaniritse zofunikira zamapulogalamu apamwamba a optoelectronic. Gawo laling'onoli limakhala ndi mawonekedwe a ndege a M-nonpolar, omwe ndi ofunikira kwambiri kuti achepetse zovuta za polarization pazida monga ma LED ndi ma laser diode, zomwe zimapangitsa kuti magwiridwe antchito azigwira bwino ntchito.
The10x10mm Nonpolar M-ndege Aluminiyamu gawo lapansiamapangidwa mwaluso mwapadera kwambiri, kuwonetsetsa kuti kachulukidwe kakang'ono kachilema komanso kapangidwe kake kabwino kwambiri. Izi zimapangitsa kukhala chisankho choyenera pa kukula kwa epitaxial kwa mafilimu apamwamba a III-nitride, omwe ndi ofunikira kuti apange zipangizo zamakono za optoelectronic.
Umisiri wolondola wa Semicera umatsimikizira kuti aliyense10x10mm Nonpolar M-ndege Aluminiyamu gawo lapansiimapereka makulidwe osasinthasintha komanso kusalala kwapansi, zomwe ndizofunikira pakuyika filimu yofananira ndi kupanga zida. Kuonjezera apo, kukula kwa gawo lapansili kumapangitsa kuti ikhale yoyenera pazochitika zonse za kafukufuku ndi zopangira, zomwe zimalola kuti zigwiritsidwe ntchito mosiyanasiyana pazinthu zosiyanasiyana. Ndi kukhazikika kwake kwamafuta ndi mankhwala, gawo lapansili limapereka maziko odalirika opangira matekinoloje a optoelectronic.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
